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Integration of semiconductor nanowires in silicon CMOS technology: compatibility study

Date

2007
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dc.contributor.authorVereecken, Philippe
dc.contributor.authorBjörk, Michael
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorIacopi, Francesca
dc.contributor.authorRiel, Heike
dc.contributor.authorRiess, Walter
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVijayraghavan, Raghavan
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.date.accessioned2021-10-16T21:22:41Z
dc.date.available2021-10-16T21:22:41Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13171
dc.source.conferenceEuropean Congress and Exhibition on Advanced Materials and Processes - EUROMAT
dc.source.conferencedate10/09/2007
dc.source.conferencelocationNürnberg Germany
dc.title

Integration of semiconductor nanowires in silicon CMOS technology: compatibility study

dc.typeOral presentation
dspace.entity.typePublication
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