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Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
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Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Melkonyan, Davit
;
Arnoldi, Laurent
;
Fleischmann, Claudia
;
Kumar, Arul
;
Vurpillot, Francois
;
Bogdanowicz, Janusz
;
Vandervorst, Wilfried
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1869
since deposited on 2021-10-23
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Acq. date: 2025-12-10
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Metrics
Views
1869
since deposited on 2021-10-23
1
last month
Acq. date: 2025-12-10
Citations