Publication:
Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching
Date
| dc.contributor.author | Gul, Banat | |
| dc.contributor.author | Tinck, Stefan | |
| dc.contributor.author | De Schepper, Peter | |
| dc.contributor.author | Rehman, Aman-ur | |
| dc.contributor.imecauthor | De Schepper, Peter | |
| dc.date.accessioned | 2021-10-22T19:32:33Z | |
| dc.date.available | 2021-10-22T19:32:33Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0022-3727 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25345 | |
| dc.identifier.url | http://iopscience.iop.org/0022-3727/48/2/025202/ | |
| dc.source.beginpage | 25202 | |
| dc.source.issue | 2 | |
| dc.source.journal | Journal of Physics D: Applied Physics | |
| dc.source.volume | 48 | |
| dc.title | Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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