Publication:

Nanoscale etching and reoxidation of InAs

Date

2014
Proceedings Paper
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dc.contributor.authorvan Dorp, Dennis
dc.contributor.authorArnauts, Sophia
dc.contributor.authorCuypers, Daniel
dc.contributor.authorRip, Jens
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-22T07:09:04Z
dc.date.available2021-10-22T07:09:04Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24687
dc.identifier.urlhttp://www.scientific.net/SSP.219.56
dc.source.beginpage56
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XII - UCPSS
dc.source.conferencedate21/09/2014
dc.source.conferencelocationBrussels Belgium
dc.source.endpage58
dc.title

Nanoscale etching and reoxidation of InAs

dc.typeProceedings paper
dspace.entity.typePublication
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