Publication:

Study of EUV stochastic defect on wafer yield

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010858
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0009-0003-7858-1802
cris.virtual.orcid0000-0002-0926-848X
cris.virtualsource.department36776dda-d165-44b8-ae0d-6d7d912212f5
cris.virtualsource.department358fc7a1-f40e-4b11-91b3-d75922de09bb
cris.virtualsource.orcid36776dda-d165-44b8-ae0d-6d7d912212f5
cris.virtualsource.orcid358fc7a1-f40e-4b11-91b3-d75922de09bb
dc.contributor.authorTsai, Yi-Pei
dc.contributor.authorChang, Chieh-Miao
dc.contributor.authorChang, Yi-Han
dc.contributor.authorOak, Apoorva
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.imecauthorTsai, Yi-Pei
dc.contributor.imecauthorChang, Chieh-Miao
dc.contributor.imecauthorChang, Yi-Han
dc.contributor.imecauthorOak, Apoorva
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.orcidimecOak, Apoorva::0000-0002-0926-848X
dc.contributor.orcidimecTrivkovic, Darko::0009-0003-7858-1802
dc.date.accessioned2024-08-20T09:01:24Z
dc.date.available2024-06-15T17:25:02Z
dc.date.available2024-08-20T09:01:24Z
dc.date.embargo2024-04-10
dc.date.issued2024
dc.identifier.doi10.1117/12.3010858
dc.identifier.eisbn978-1-5106-7215-4
dc.identifier.isbn978-1-5106-7214-7
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44032
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1295404
dc.source.conferenceConference on DTCO and Computational Patterning III
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages8
dc.source.volume12954
dc.title

Study of EUV stochastic defect on wafer yield

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
1295404.pdf
Size:
1.34 MB
Format:
Adobe Portable Document Format
Description:
Published version
Download
Publication available in collections:
Conference contributions