Publication:
Defectivity in chemical mechanical planarization: A multiscale approach
Date
| dc.contributor.author | Chandra, A. | |
| dc.contributor.author | Bastawros, A. F. | |
| dc.contributor.author | Biswas, R. | |
| dc.contributor.author | Sherman, P. J. | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-17T06:28:21Z | |
| dc.date.available | 2021-10-17T06:28:21Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13493 | |
| dc.source.beginpage | 107 | |
| dc.source.conference | Proceedings 13th Int. Conference on Chemical-Mechanical Polish (CMP) Planarization for ULSI Multilevel Interconnection - CMP-MIC | |
| dc.source.conferencedate | 4/03/2008 | |
| dc.source.conferencelocation | Fremont, CA USA | |
| dc.source.endpage | 112 | |
| dc.title | Defectivity in chemical mechanical planarization: A multiscale approach | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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