Publication:
Effect of deposition and annealing temperature on the structural and mechanical properties of poly SiGe
Date
| dc.contributor.author | Sedky, Sherif | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Roussel, Philippe | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Roussel, Philippe | |
| dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
| dc.date.accessioned | 2021-10-14T17:47:36Z | |
| dc.date.available | 2021-10-14T17:47:36Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5643 | |
| dc.source.beginpage | A8.5.1 | |
| dc.source.conference | Amorphous and Heterogeneous Silicon Thin Films - 2000; San Francisco, CA, USA; 24-28 April 2000. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 6 | |
| dc.title | Effect of deposition and annealing temperature on the structural and mechanical properties of poly SiGe | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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