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Characterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurements
Publication:
Characterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurements
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Martin Hoyas, Ana
;
Schuhmacher, Jorg
;
Celis, Jean-Pierre
;
Maex, Karen
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1942
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Acq. date: 2026-02-24
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Statistics
Views
1942
since deposited on 2021-10-14
1
last month
Acq. date: 2026-02-24
Citations