Publication:
Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
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1946 since deposited on 2021-10-23
2last month
Acq. date: 2025-12-08
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Metrics
Views
1946 since deposited on 2021-10-23
2last month
Acq. date: 2025-12-08
Citations