Publication:
The 2009 ITRS roadmap: EHS and heterogeneous challenges
Date
| dc.contributor.author | Declerck, Gilbert | |
| dc.contributor.imecauthor | Declerck, Gilbert | |
| dc.date.accessioned | 2021-10-18T15:55:59Z | |
| dc.date.available | 2021-10-18T15:55:59Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 1363-5182 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16989 | |
| dc.identifier.url | http://www.future-fab.com/content/PDF/FF32_ITRS_Jan_10.pdf | |
| dc.source.beginpage | 14 | |
| dc.source.issue | 32 | |
| dc.source.journal | Future Fab International | |
| dc.title | The 2009 ITRS roadmap: EHS and heterogeneous challenges | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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