Oxygen soluble gate electrodes for prolonged high-kappa gate-stack reliability

dc.contributor.author	Raghavan, Nagarajan
dc.contributor.author	Pey, Kin Leong
dc.contributor.author	Wu, Xing
dc.contributor.author	Liu, Wenhu
dc.contributor.author	Li, Xiang
dc.contributor.author	Bosman, Bosman
dc.contributor.author	Kauerauf, Thomas
dc.date.accessioned	2021-10-19T17:50:45Z
dc.date.available	2021-10-19T17:50:45Z
dc.date.embargo	9999-12-31
dc.date.issued	2011
dc.identifier.issn	0741-3106
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/19648
dc.source.beginpage	252
dc.source.endpage	254
dc.source.issue	3
dc.source.journal	IEEE Electron Device Letters
dc.source.volume	32
dc.title	Oxygen soluble gate electrodes for prolonged high-kappa gate-stack reliability
dc.type	Journal article
dspace.entity.type	Publication
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