Publication:

Improved phosphoric acid mixtures for nitride strip

Date

2001
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-2610-3406
cris.virtual.orcid0000-0002-4298-5851
cris.virtualsource.departmentf44fed8c-edfd-4564-84f1-58a59c0caf6c
cris.virtualsource.department6bca2580-fe8c-4b07-87e1-c34fbfbb75ce
cris.virtualsource.orcidf44fed8c-edfd-4564-84f1-58a59c0caf6c
cris.virtualsource.orcid6bca2580-fe8c-4b07-87e1-c34fbfbb75ce
dc.contributor.authorVos, Rita
dc.contributor.authorLux, Marcel
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorHatcher, Z.
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-14T18:21:15Z
dc.date.available2021-10-14T18:21:15Z
dc.date.embargo9999-12-31
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5822
dc.source.beginpage43
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS
dc.source.conferencedate18/09/2000
dc.source.conferencelocationOostende Belgium
dc.source.endpage46
dc.title

Improved phosphoric acid mixtures for nitride strip

dc.typeProceedings paper
dspace.entity.typePublication
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