Publication:
Charging and the secondary electron-electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching
Date
| dc.contributor.author | Palov, A P | |
| dc.contributor.author | Mankelevich, Yu A | |
| dc.contributor.author | Rakhimova, T V | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.date.accessioned | 2021-10-18T19:59:26Z | |
| dc.date.available | 2021-10-18T19:59:26Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0022-3727 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17757 | |
| dc.source.beginpage | 75203 | |
| dc.source.issue | 7 | |
| dc.source.journal | Journal of Physics D: Applied Physics | |
| dc.source.volume | 43 | |
| dc.title | Charging and the secondary electron-electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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