Publication:
Trends in e-beam Metrology and Inspection
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.imecauthor | Lorusso, Gian Francesco | |
| dc.date.accessioned | 2024-06-15T17:25:27Z | |
| dc.date.available | 2024-06-15T17:25:27Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1117/12.3010120 | |
| dc.identifier.eisbn | 978-1-5106-7217-8 | |
| dc.identifier.isbn | 978-1-5106-7216-1 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44040 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 1295515 | |
| dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVIII | |
| dc.source.conferencedate | 2024-02-25 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 12 | |
| dc.subject.keywords | SEM | |
| dc.title | Trends in e-beam Metrology and Inspection | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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