Publication:
Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe films
Date
| dc.contributor.author | Molfese, Antonio | |
| dc.contributor.author | Mehta, Anshu | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-15T14:57:42Z | |
| dc.date.available | 2021-10-15T14:57:42Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9318 | |
| dc.source.journal | Sensors and Actuators A | |
| dc.title | Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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