Publication:

Silicone oxidation for a-Si:H passivation of wafers bonded to glass

Date

2014
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorGranata, Stefano
dc.contributor.authorBearda, Twan
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorAbdulraheem, Yaser
dc.contributor.authorGordon, Ivan
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-10-22T01:43:36Z
dc.date.available2021-10-22T01:43:36Z
dc.date.issued2014
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23878
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201409081/abstract
dc.source.beginpage395
dc.source.endpage398
dc.source.issue5
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.volume8
dc.title

Silicone oxidation for a-Si:H passivation of wafers bonded to glass

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles