Publication:
Characterization and testing methods for MEMS reliability
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-16T15:38:35Z | |
| dc.date.available | 2021-10-16T15:38:35Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12002 | |
| dc.source.conference | Transducers | |
| dc.source.conferencedate | 10/06/2007 | |
| dc.source.conferencelocation | Lyon France | |
| dc.title | Characterization and testing methods for MEMS reliability | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |