Publication:

Patterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etching

Date

2016
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-8574-1235
cris.virtualsource.department846d8fc0-f203-4ef5-be37-a5353cf001c3
cris.virtualsource.orcid846d8fc0-f203-4ef5-be37-a5353cf001c3
dc.contributor.authorVan Erps, Jurgen
dc.contributor.authorCiuk, Tymoteusz
dc.contributor.authorPasternak, Iwona
dc.contributor.authorKrajewska, Aleksandra
dc.contributor.authorStrupinski, Wlodek
dc.contributor.authorVan Put, Steven
dc.contributor.authorVan Steenberge, Geert
dc.contributor.authorBaert, Kitty
dc.contributor.authorTerryn, Herman
dc.contributor.authorThienpont, Hugo
dc.contributor.authorVermeulen, Nathalie
dc.contributor.imecauthorVan Put, Steven
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.date.accessioned2021-10-23T16:04:42Z
dc.date.available2021-10-23T16:04:42Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27458
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2523711&resultClick=1
dc.source.beginpage98910T
dc.source.conferenceSilicon Photonics and Photonic Integrated Circuits V
dc.source.conferencedate3/04/2016
dc.source.conferencelocationBrussels Belgium
dc.title

Patterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etching

dc.typeProceedings paper
dspace.entity.typePublication
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