Publication:

P-N junction diagnostics of the electrical epi-layer quality: a feasibility study

Date

1998
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-5218-4046
cris.virtualsource.department715a9ada-0798-46d2-a8ca-4775db9a8e46
cris.virtualsource.orcid715a9ada-0798-46d2-a8ca-4775db9a8e46
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, Cor
dc.contributor.authorCzerwinski, A.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-01T08:56:44Z
dc.date.available2021-10-01T08:56:44Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2952
dc.source.beginpage410
dc.source.conferenceProceedings of the 5th International Symposium on High Purity Silicon V
dc.source.conferencedate2/11/1998
dc.source.conferencelocationBoston, MA USA
dc.source.endpage420
dc.title

P-N junction diagnostics of the electrical epi-layer quality: a feasibility study

dc.typeProceedings paper
dspace.entity.typePublication
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