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New insights into metal drift induced failure in MOL and BEOL
Publication:
New insights into metal drift induced failure in MOL and BEOL
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wu, Chen
;
Varela Pedreira, Olalla
;
Lesniewska, Alicja
;
Li, Yunlong
;
Ciofi, Ivan
;
Tokei, Zsolt
;
Croes, Kristof
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1972
since deposited on 2021-10-26
2
last month
Acq. date: 2025-12-15
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Metrics
Views
1972
since deposited on 2021-10-26
2
last month
Acq. date: 2025-12-15
Citations