Publication:

Transport-based dopant metrology in advanced FinFETs

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLansbergen, G.P.
dc.contributor.authorRahman, R.
dc.contributor.authorWellard, C.J.
dc.contributor.authorCaro, J.
dc.contributor.authorCollaert, Nadine
dc.contributor.authorBiesemans, Serge
dc.contributor.authorKlimeck, G.
dc.contributor.authorHollenberg, L.C.L.
dc.contributor.authorRogge, S.
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-17T08:09:28Z
dc.date.available2021-10-17T08:09:28Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13986
dc.source.beginpage713
dc.source.conferenceTechnical Digest International Electron Devices Meeting - IEDM
dc.source.conferencedate15/12/2008
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage716
dc.title

Transport-based dopant metrology in advanced FinFETs

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
16634.pdf
Size:
499.51 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions