Publication:
Transport-based dopant metrology in advanced FinFETs
Date
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.orcid | 0000-0002-8062-3165 | |
cris.virtualsource.department | c807a03a-358d-4274-b622-dee889a60454 | |
cris.virtualsource.orcid | c807a03a-358d-4274-b622-dee889a60454 | |
dc.contributor.author | Lansbergen, G.P. | |
dc.contributor.author | Rahman, R. | |
dc.contributor.author | Wellard, C.J. | |
dc.contributor.author | Caro, J. | |
dc.contributor.author | Collaert, Nadine | |
dc.contributor.author | Biesemans, Serge | |
dc.contributor.author | Klimeck, G. | |
dc.contributor.author | Hollenberg, L.C.L. | |
dc.contributor.author | Rogge, S. | |
dc.contributor.imecauthor | Collaert, Nadine | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
dc.date.accessioned | 2021-10-17T08:09:28Z | |
dc.date.available | 2021-10-17T08:09:28Z | |
dc.date.embargo | 9999-12-31 | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13986 | |
dc.source.beginpage | 713 | |
dc.source.conference | Technical Digest International Electron Devices Meeting - IEDM | |
dc.source.conferencedate | 15/12/2008 | |
dc.source.conferencelocation | San Francisco, CA USA | |
dc.source.endpage | 716 | |
dc.title | Transport-based dopant metrology in advanced FinFETs | |
dc.type | Proceedings paper | |
dspace.entity.type | Publication | |
Files | Original bundle
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