Publication:
Observation of flexoelectric effect in PECVD silicon nitride
| dc.contributor.author | Nguyen, B. H. | |
| dc.contributor.author | Wu, C. | |
| dc.contributor.author | Czarnecki, P. | |
| dc.contributor.author | Rochus, V. | |
| dc.contributor.imecauthor | Nguyen, B. H. | |
| dc.contributor.imecauthor | Wu, C. | |
| dc.contributor.imecauthor | Czarnecki, P. | |
| dc.contributor.imecauthor | Rochus, V. | |
| dc.date.accessioned | 2025-01-14T17:43:19Z | |
| dc.date.available | 2025-01-14T17:43:19Z | |
| dc.date.issued | 2025-JAN 6 | |
| dc.description.wosFundingText | This project has received funding from the European Union's Horizon 2020 research and innovation programme under the Marie Sk & lstrok;odowska-Curie Grant Agreement No. 101063162. The authors are grateful to our imec colleagues Guilherme Brondani Torri and Myriam Willegems for their help with photolithography mask and XSEM images. | |
| dc.identifier.doi | 10.1063/5.0244972 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45080 | |
| dc.publisher | AIP Publishing | |
| dc.source.issue | 1 | |
| dc.source.journal | APPLIED PHYSICS LETTERS | |
| dc.source.numberofpages | 5 | |
| dc.source.volume | 126 | |
| dc.subject.keywords | PIEZOELECTRICITY | |
| dc.title | Observation of flexoelectric effect in PECVD silicon nitride | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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