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Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25

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1881 since deposited on 2021-10-27
Acq. date: 2026-09-19

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1881 since deposited on 2021-10-27
Acq. date: 2026-09-19

Citations