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Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25
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Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25
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Date
2019-10
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wostyn, Kurt
;
Ragnarsson, Lars-Ake
;
Arimura, Hiroaki
;
Vaisman Chasin, Adrian
;
Conard, Thierry
;
Rondas, Dirk
;
Loo, Roger
;
Holsteyns, Frank
;
Horiguchi, Naoto
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1875
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Acq. date: 2025-12-15
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Metrics
Views
1875
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-15
Citations