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Metastable and stable transistion-metal silicide layer formation in Si and SiGe
Publication:
Metastable and stable transistion-metal silicide layer formation in Si and SiGe
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dézsi, I.
;
Fetzer, C.
;
Bill, E.
;
Caymax, Matty
;
Pattyn, Hugo
;
Degroote, Sven
;
Langouche, G.
;
Vantomme, Andre
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1953
since deposited on 2021-10-06
Acq. date: 2025-12-11
Citations
Metrics
Views
1953
since deposited on 2021-10-06
Acq. date: 2025-12-11
Citations