Publication:

Exploration of GHz-scanning acoustic microscopy for failure analysis of innovative silicon technologies

Date

2019-12
Dissertation
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-2892-3176
cris.virtualsource.department948aac93-47b8-4f21-8d0e-48fd52ec8746
cris.virtualsource.orcid948aac93-47b8-4f21-8d0e-48fd52ec8746
dc.contributor.authorKhaled, Ahmad
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.thesisadvisorDe Wolf, Ingrid
dc.contributor.thesisadvisorWevers, Martine
dc.date.accessioned2021-10-27T11:19:04Z
dc.date.available2021-10-27T11:19:04Z
dc.date.embargo9999-12-31
dc.date.issued2019-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33274
dc.title

Exploration of GHz-scanning acoustic microscopy for failure analysis of innovative silicon technologies

dc.typePHD thesis
dspace.entity.typePublication
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