Publication:
Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure
Date
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Travaly, Youssef | |
| dc.contributor.author | Waldfried, Carlo | |
| dc.contributor.author | Gage, David M. | |
| dc.contributor.author | Dauskardt, Reinhold | |
| dc.contributor.author | Houthoofd, Kristof | |
| dc.contributor.author | Jacobs, Pierre | |
| dc.contributor.author | Adriaensens, Peter | |
| dc.contributor.author | Schulze, Knut | |
| dc.contributor.author | Schulz, Stefan | |
| dc.contributor.author | List, Scott | |
| dc.contributor.author | Carlotti, Giovanni | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Adriaensens, Peter | |
| dc.date.accessioned | 2021-10-16T16:47:46Z | |
| dc.date.available | 2021-10-16T16:47:46Z | |
| dc.date.issued | 2007-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12326 | |
| dc.source.beginpage | 1407 | |
| dc.source.endpage | 1414 | |
| dc.source.issue | 4 | |
| dc.source.journal | Acta Materialia | |
| dc.source.volume | 55 | |
| dc.title | Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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