Publication:
Investigation on molybdenum and its conductive oxides as p-type metal gate candidates
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-9036-8241 | |
| cris.virtual.orcid | 0000-0003-3775-3578 | |
| cris.virtual.orcid | 0000-0003-1533-7055 | |
| cris.virtual.orcid | 0000-0002-8528-9469 | |
| cris.virtualsource.department | b5b8437b-a909-4ee5-812e-0ce57bfdeaaf | |
| cris.virtualsource.department | 1fd77399-4d0a-4004-8a7f-9634c67c90de | |
| cris.virtualsource.department | 2fc65eb2-c2f1-4505-bb09-96f2d0aa6ce9 | |
| cris.virtualsource.department | dea1f9e7-d90f-422a-955f-57bcb10cfd54 | |
| cris.virtualsource.orcid | b5b8437b-a909-4ee5-812e-0ce57bfdeaaf | |
| cris.virtualsource.orcid | 1fd77399-4d0a-4004-8a7f-9634c67c90de | |
| cris.virtualsource.orcid | 2fc65eb2-c2f1-4505-bb09-96f2d0aa6ce9 | |
| cris.virtualsource.orcid | dea1f9e7-d90f-422a-955f-57bcb10cfd54 | |
| dc.contributor.author | Li, Zilan | |
| dc.contributor.author | Schram, Tom | |
| dc.contributor.author | Witters, Thomas | |
| dc.contributor.author | Cho, Hag-Ju | |
| dc.contributor.author | O'Sullivan, Barry | |
| dc.contributor.author | Hooker, Jacob | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.imecauthor | Schram, Tom | |
| dc.contributor.imecauthor | Witters, Thomas | |
| dc.contributor.imecauthor | O'Sullivan, Barry | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.contributor.orcidimec | O'Sullivan, Barry::0000-0002-9036-8241 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-16T17:30:41Z | |
| dc.date.available | 2021-10-16T17:30:41Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12486 | |
| dc.source.beginpage | 575 | |
| dc.source.conference | Physics and Technology of High-k Dielectrics | |
| dc.source.conferencedate | 7/10/2007 | |
| dc.source.conferencelocation | Washington USA | |
| dc.source.endpage | 583 | |
| dc.title | Investigation on molybdenum and its conductive oxides as p-type metal gate candidates | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |