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Investigation on molybdenum and its conductive oxides as p-type metal gate candidates

Date

2007
Proceedings Paper
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dc.contributor.authorLi, Zilan
dc.contributor.authorSchram, Tom
dc.contributor.authorWitters, Thomas
dc.contributor.authorCho, Hag-Ju
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorHooker, Jacob
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDe Meyer, Kristin
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T17:30:41Z
dc.date.available2021-10-16T17:30:41Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12486
dc.source.beginpage575
dc.source.conferencePhysics and Technology of High-k Dielectrics
dc.source.conferencedate7/10/2007
dc.source.conferencelocationWashington USA
dc.source.endpage583
dc.title

Investigation on molybdenum and its conductive oxides as p-type metal gate candidates

dc.typeProceedings paper
dspace.entity.typePublication
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