Publication:
Experimental and theoretical study of RF capacitevely-coupled plasma in the Ar/CF4/CF3I mixtures
Date
| dc.contributor.author | Proshina, O. | |
| dc.contributor.author | Rakhimova, T. | |
| dc.contributor.author | Lopaev, D. | |
| dc.contributor.author | Samara, V. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-22T21:57:01Z | |
| dc.date.available | 2021-10-22T21:57:01Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0963-0252 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25777 | |
| dc.identifier.url | http://iopscience.iop.org/article/10.1088/0963-0252/24/5/055006/meta | |
| dc.source.beginpage | 55006 | |
| dc.source.issue | 5 | |
| dc.source.journal | Plasma Sources Science and Technology | |
| dc.source.volume | 24 | |
| dc.title | Experimental and theoretical study of RF capacitevely-coupled plasma in the Ar/CF4/CF3I mixtures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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