Publication:

High resolution study of high-k dielectrics with Conductive AFM

Date

2008
Proceedings Paper
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dc.contributor.authorPolspoel, Wouter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-17T09:54:59Z
dc.date.available2021-10-17T09:54:59Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14327
dc.source.conferenceDutch Scanning Probe Microscopy Symposium - SPM-Day
dc.source.conferencedate8/12/2008
dc.source.conferencelocationUtrecht The Netherlands
dc.title

High resolution study of high-k dielectrics with Conductive AFM

dc.typeProceedings paper
dspace.entity.typePublication
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