Publication:

Detachable three-layer Au absorber microfabrication for low-temperature detectors

Date

2023
Journal article
https://doi.org/10.1016/j.mne.2023.100220
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dc.contributor.authorHadid, Jawad
dc.contributor.authorRodrigues, Matias
dc.contributor.authorHarouri, Abdelmounaim
dc.contributor.authorDupuis, Christophe
dc.contributor.authorBouville, David
dc.contributor.authorMartin, Antoine
dc.contributor.authorLoidl, Martin
dc.contributor.authorFerlazzo, Laurence
dc.contributor.imecauthorHadid, Jawad
dc.contributor.orcidimecHadid, Jawad::0000-0003-1036-2550
dc.date.accessioned2023-11-30T11:36:39Z
dc.date.available2023-08-26T17:25:37Z
dc.date.available2023-08-30T09:39:32Z
dc.date.available2023-11-30T11:36:39Z
dc.date.embargo2023-05-10
dc.date.issued2023
dc.description.wosFundingTextThis work is part of the project 20FUN04 PrimA-LTD that has received funding from the EMPIR programme co-financed by the & nbsp;Participating States and from the European Union's Horizon 2020 research and innovation programme. This work was done within the C2N micro nanotechnologies platforms and was partly supported by the RENATECH network and the General Council of Essonne. The authors thank Laetitia Leroy for PVD deposition, Sebastian Kempf and Joern Beyer for fruitful discussion in the choice of Au electrolyte.
dc.identifier.doi10.1016/j.mne.2023.100220
dc.identifier.issn2590-0072
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42397
dc.publisherELSEVIER
dc.source.beginpageArt. 100220
dc.source.endpage8
dc.source.issuena
dc.source.journalMICRO AND NANO ENGINEERING
dc.source.numberofpages8
dc.source.volume20
dc.subject.keywordsNANOPOROUS MATERIALS
dc.subject.keywordsBETA SPECTROMETRY
dc.subject.keywordsSPECTROSCOPY
dc.subject.keywordsEVOLUTION
dc.title

Detachable three-layer Au absorber microfabrication for low-temperature detectors

dc.typeJournal article
dspace.entity.typePublication
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