Publication:

Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic appliation

Date

2010-10
Proceedings Paper
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dc.contributor.authorNguyen, Duy
dc.contributor.authorWang, Gang
dc.contributor.authorBrammertz, Guy
dc.contributor.authorLeys, Maarten
dc.contributor.authorWaldron, Niamh
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorLismont, Kevin
dc.contributor.authorDekoster, Johan
dc.contributor.authorLoo, Roger
dc.contributor.authorMeuris, Marc
dc.contributor.authorDegroote, Stefan
dc.contributor.authorButtita, F
dc.contributor.authorO'Neil, B.
dc.contributor.authorFéron, O.
dc.contributor.authorLindner, J.
dc.contributor.authorSchulte, F.
dc.contributor.authorSchineller, B.
dc.contributor.authorHeuken, M.
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-18T19:32:36Z
dc.date.available2021-10-18T19:32:36Z
dc.date.embargo9999-12-31
dc.date.issued2010-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17690
dc.source.beginpage933
dc.source.conferenceSiGe, Ge, and Related Compounds 4: Materials, Processing and Devices
dc.source.conferencedate11/10/2010
dc.source.conferencelocationLas Vegas, NV USA
dc.source.endpage939
dc.title

Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic appliation

dc.typeProceedings paper
dspace.entity.typePublication
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