Publication:

The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurements

Date

1998
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-5604-4198
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-4630-5569
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department7fb6e8b2-cf23-44c4-a949-3a04cd25ec8d
cris.virtualsource.departmentfe9d19e2-9499-4a59-89b2-19f5db872239
cris.virtualsource.department3b4fdab4-572d-472c-a07d-551bbe745a80
cris.virtualsource.departmentbb9c66a8-60a0-4f4b-9c7c-d1ca7e7f5571
cris.virtualsource.orcid7fb6e8b2-cf23-44c4-a949-3a04cd25ec8d
cris.virtualsource.orcidfe9d19e2-9499-4a59-89b2-19f5db872239
cris.virtualsource.orcid3b4fdab4-572d-472c-a07d-551bbe745a80
cris.virtualsource.orcidbb9c66a8-60a0-4f4b-9c7c-d1ca7e7f5571
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorMaex, Karen
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorLekens, Geert
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Schepper, Luc
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorLekens, Geert
dc.contributor.imecauthorD'Haen, Jan
dc.date.accessioned2021-10-01T09:49:04Z
dc.date.available2021-10-01T09:49:04Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3158
dc.source.beginpage1035
dc.source.conferenceProceedings of the 9th European Symposium on Reliability of Electron Devices and Failure Physics - ESREF
dc.source.conferencelocation
dc.source.endpage1041
dc.title

The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurements

dc.typeProceedings paper
dspace.entity.typePublication
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