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A CMOS-compatible 20MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperature

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1929 since deposited on 2021-10-19
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Acq. date: 2026-10-10

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1929 since deposited on 2021-10-19
2last month
2last week
Acq. date: 2026-10-10

Citations