Publication:

Processing and defect control in advanced Ge technologies

Date

2007
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorSatta, Alessandra
dc.contributor.authorOpsomer, Karl
dc.contributor.authorMeuris, Marc
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-16T15:20:25Z
dc.date.available2021-10-16T15:20:25Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11882
dc.source.conferenceProceedings of the IEEE International Workshop on Electron Devices Semiconductor Technology - EDST
dc.source.conferencedate3/06/2007
dc.source.conferencelocationBeijing China
dc.title

Processing and defect control in advanced Ge technologies

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions