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Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries

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dc.contributor.authorHenderick, Lowie
dc.contributor.authorBlomme, Ruben
dc.contributor.authorMinjauw, Matthias
dc.contributor.authorKeukelier, Jonas
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorDendooven, Jolien
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDetavernier, Christophe
dc.contributor.imecauthorKeukelier, Jonas
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2022-08-25T10:21:30Z
dc.date.available2022-01-23T02:08:38Z
dc.date.available2022-04-25T15:41:09Z
dc.date.available2022-06-09T10:06:43Z
dc.date.available2022-08-25T10:21:30Z
dc.date.embargo2023-01-01
dc.date.issued2022-02
dc.description.wosFundingTextThe authors are grateful for financial support from FWO-Vlaanderen and the Special Research Fund BOF of Ghent University (GOA project, Grant No. 01G01019 and SBO XL-Lion, S005017N). M. M. and J. D. acknowledge FWO-Vlaanderen for a post-doctoral fellowship. The authors would also like to thank Olivier Janssens for conducting the SEM measurements.
dc.identifier.doi10.1039/d1dt03417k
dc.identifier.issn1477-9226
dc.identifier.pmidMEDLINE:35040840
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38772
dc.publisherROYAL SOC CHEMISTRY
dc.source.beginpage2059
dc.source.endpage2067
dc.source.issue5
dc.source.journalDALTON TRANSACTIONS
dc.source.numberofpages9
dc.source.volume5
dc.subject.disciplineApplied physics
dc.subject.keywordsCYCLING PERFORMANCE
dc.subject.keywordsALUMINUM PHOSPHATE
dc.subject.keywordsTHIN-FILM
dc.subject.keywordsVOLTAGE
dc.subject.keywordsSTABILITY
dc.subject.keywordsOXIDATION
dc.subject.keywordsELECTRODE
dc.subject.keywordsCOATINGS
dc.subject.keywordsIRON
dc.subject.keywordsNI
dc.title

Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries

dc.typeJournal article
dspace.entity.typePublication
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