Publication:
FinFET stressor efficiency on alternative wafer and channel orientations for the14nm node and beyond
Date
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | De Keersgieter, An | |
| dc.contributor.author | Mocuta, Anda | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Thean, Aaron | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | De Keersgieter, An | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Thean, Aaron | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2021-10-22T19:11:49Z | |
| dc.date.available | 2021-10-22T19:11:49Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25255 | |
| dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165898 | |
| dc.source.beginpage | 1 | |
| dc.source.conference | International Conference on IC Design & Technology - ICICDT | |
| dc.source.conferencedate | 1/06/2015 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.source.endpage | 4 | |
| dc.title | FinFET stressor efficiency on alternative wafer and channel orientations for the14nm node and beyond | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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