Publication:
Coupled multiphysics circuital modelling of micro-opto-mechanical sensor systems
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0001-6685-4699 | |
| cris.virtual.orcid | 0000-0003-0920-1709 | |
| cris.virtual.orcid | 0000-0001-9680-5724 | |
| cris.virtualsource.department | 78abe9ad-0cd2-44dc-8753-68c30e2b65b6 | |
| cris.virtualsource.department | 48d3caed-8049-4a39-ae25-dd247b165b25 | |
| cris.virtualsource.department | 48c5c9e1-8758-436d-bfb9-70a2f1fe3ada | |
| cris.virtualsource.orcid | 78abe9ad-0cd2-44dc-8753-68c30e2b65b6 | |
| cris.virtualsource.orcid | 48d3caed-8049-4a39-ae25-dd247b165b25 | |
| cris.virtualsource.orcid | 48c5c9e1-8758-436d-bfb9-70a2f1fe3ada | |
| dc.contributor.author | Troia, Benedetto | |
| dc.contributor.author | Huang, Chih Hsien | |
| dc.contributor.author | Mao, Shengping | |
| dc.contributor.author | Gao, Hang | |
| dc.contributor.author | Figeys, Bruno | |
| dc.contributor.author | Jansen, Roelof | |
| dc.contributor.author | Rochus, Veronique | |
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Gao, Hang | |
| dc.contributor.imecauthor | Figeys, Bruno | |
| dc.contributor.imecauthor | Jansen, Roelof | |
| dc.contributor.imecauthor | Rochus, Veronique | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.contributor.orcidimec | Figeys, Bruno::0000-0002-0108-3907 | |
| dc.contributor.orcidimec | Jansen, Roelof::0000-0001-6685-4699 | |
| dc.date.accessioned | 2021-10-26T05:57:53Z | |
| dc.date.available | 2021-10-26T05:57:53Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31973 | |
| dc.identifier.url | https://doi.org/10.1117/12.2290361 | |
| dc.source.beginpage | 1054518 | |
| dc.source.conference | MOEMS and Miniaturized Systems XVII | |
| dc.source.conferencedate | 27/01/2018 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Coupled multiphysics circuital modelling of micro-opto-mechanical sensor systems | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |