Publication:

Coupled multiphysics circuital modelling of micro-opto-mechanical sensor systems

Date

2018
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorTroia, Benedetto
dc.contributor.authorHuang, Chih Hsien
dc.contributor.authorMao, Shengping
dc.contributor.authorGao, Hang
dc.contributor.authorFigeys, Bruno
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.date.accessioned2021-10-26T05:57:53Z
dc.date.available2021-10-26T05:57:53Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31973
dc.identifier.urlhttps://doi.org/10.1117/12.2290361
dc.source.beginpage1054518
dc.source.conferenceMOEMS and Miniaturized Systems XVII
dc.source.conferencedate27/01/2018
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Coupled multiphysics circuital modelling of micro-opto-mechanical sensor systems

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
37774.pdf
Size:
742.56 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions