Extreme scaled gate dielectrics by using ALD HfO2/SrTiO3 composite structures

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Author(s)

Pierreux, Dieter

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Machkaoutsan, Vladimir

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Adelmann, Christoph

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Van Elshocht, Sven

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Popovici, Mihaela Ioana

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Conard, Thierry

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Ragnarsson, Lars-Ake

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Metrics

1946 since deposited on 2021-10-18

Acq. date: 2025-10-23