Publication:

Influence of beam incidence angle on dry laser cleaning of surface parcticles

Date

2000
Journal article
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-9058-9338
cris.virtualsource.department3b07f0cf-e8a1-4279-9e7b-9b256ec03e01
cris.virtualsource.orcid3b07f0cf-e8a1-4279-9e7b-9b256ec03e01
dc.contributor.authorVereecke, Guy
dc.contributor.authorRöhr, Erika
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-14T14:13:37Z
dc.date.available2021-10-14T14:13:37Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4909
dc.source.beginpage67
dc.source.endpage73
dc.source.issue1_2
dc.source.journalApplied Surface Science
dc.source.volume157
dc.title

Influence of beam incidence angle on dry laser cleaning of surface parcticles

dc.typeJournal article
dspace.entity.typePublication
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