Publication:

Some challenges for mask making to keep up with the roadmap

Date

1998
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-2211-9443
cris.virtual.orcid0000-0003-0803-4267
cris.virtualsource.department386aec34-c796-442e-8812-e827cd030994
cris.virtualsource.department987ea135-86ab-40b5-a86e-f94391ccf5fe
cris.virtualsource.orcid386aec34-c796-442e-8812-e827cd030994
cris.virtualsource.orcid987ea135-86ab-40b5-a86e-f94391ccf5fe
dc.contributor.authorJonckheere, Rik
dc.contributor.authorRandall, John
dc.contributor.authorMarschner, Thomas
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.accessioned2021-09-30T12:17:52Z
dc.date.available2021-09-30T12:17:52Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2657
dc.source.beginpage313
dc.source.conference18th Annual BACUS Symposium on Photomask Technology and Management
dc.source.conferencedate16/09/1998
dc.source.conferencelocationRedwood City, CA USA
dc.source.endpage324
dc.title

Some challenges for mask making to keep up with the roadmap

dc.typeProceedings paper
dspace.entity.typePublication
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