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Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing
Publication:
Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing
Date
2024
Journal article
https://doi.org/10.1117/1.JMM.23.3.034602
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baek, Seungjoo
;
Vandereyken, Jelle
;
Suh, Hyo Seon
;
Caron, Elke
;
Santos, Andreia
;
Harumoto, Masahiko
;
Guerrero, Douglas J.
;
Heo, Seonggil
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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129
since deposited on 2024-10-12
Acq. date: 2025-10-27
Citations
Metrics
Views
129
since deposited on 2024-10-12
Acq. date: 2025-10-27
Citations