Publication:

Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing

Date

2024
Journal article
https://doi.org/10.1117/1.JMM.23.3.034602
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Author(s)

Baek, Seungjoo  
;
Vandereyken, Jelle  
;
Suh, Hyo Seon  
;
Caron, Elke
;
Santos, Andreia
;
Harumoto, Masahiko
;
Guerrero, Douglas J.
;
Heo, Seonggil  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Abstract

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131 since deposited on 2024-10-12
Acq. date: 2026-02-25

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131 since deposited on 2024-10-12
Acq. date: 2026-02-25

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