Publication:

High-k dielectrics integration prospects

Date

2005
Proceedings Paper
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cris.virtual.orcid0009-0007-6964-7434
cris.virtual.orcid0000-0001-9739-7419
cris.virtual.orcid0000-0003-3775-3578
cris.virtualsource.department3e15c10a-8884-477b-b40c-a6ff454aa560
cris.virtualsource.department36689418-e07f-4cc4-8c33-f09792001dfb
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dc.contributor.authorKubicek, Stefan
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDelabie, Annelies
dc.contributor.authorYamamoto, Kazuhiko
dc.contributor.authorBeckx, Stephan
dc.contributor.authorClaes, Martine
dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorKwak, Dong Hwa
dc.contributor.authorHyun, Sangjin
dc.contributor.authorRothschild, Aude
dc.contributor.authorVeloso, Anabela
dc.contributor.authorKottantharayil, Anil
dc.contributor.authorLujan, Guilherme
dc.contributor.authorKittl, Jorge
dc.contributor.authorLauwers, Anne
dc.contributor.authorKaushik, Vidya
dc.contributor.authorNiwa, Masaaki
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorJurczak, Gosia
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T02:40:18Z
dc.date.available2021-10-16T02:40:18Z
dc.date.embargo9999-12-31
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10726
dc.source.beginpage169
dc.source.conferenceULSI Process Integration IV
dc.source.conferencedate15/05/2005
dc.source.conferencelocationQuebec Canada
dc.source.endpage192
dc.title

High-k dielectrics integration prospects

dc.typeProceedings paper
dspace.entity.typePublication
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