Publication:

Selective area growth of InP in shallow trench isolation (STI) on large scale Si(001) wafer using defect confinement technique

Date

Loading...
Thumbnail Image

Abstract

Description

Statistics

Views

1882 since deposited on 2021-10-21
1last month
Acq. date: 2026-03-16

Citations

Statistics

Views

1882 since deposited on 2021-10-21
1last month
Acq. date: 2026-03-16

Citations