Publication:
Substrates and gate dielectrics: the materials issue for sub-22nm CMOS scaling
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1881 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-05-17
Citations
Statistics
Views
1881 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-05-17
Citations