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Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks
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Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Witte, Hilde
;
Conard, Thierry
;
Vandervorst, Wilfried
;
Gijbels, R.
Journal
Applied Surface Science
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1872
since deposited on 2021-10-15
Acq. date: 2025-12-16
Citations
Metrics
Views
1872
since deposited on 2021-10-15
Acq. date: 2025-12-16
Citations