Publication:
A force study in brush scrubbing
Date
| dc.contributor.author | Xu, Kaidong | |
| dc.contributor.author | Vos, Rita | |
| dc.contributor.author | Vereecke, Guy | |
| dc.contributor.author | Doumen, Geert | |
| dc.contributor.author | Fyen, Wim | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Vinckier, Chris | |
| dc.contributor.author | Fransaer, Jan | |
| dc.contributor.imecauthor | Vos, Rita | |
| dc.contributor.imecauthor | Vereecke, Guy | |
| dc.contributor.imecauthor | Doumen, Geert | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
| dc.date.accessioned | 2021-10-16T07:16:41Z | |
| dc.date.available | 2021-10-16T07:16:41Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11577 | |
| dc.source.beginpage | 279 | |
| dc.source.conference | Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium | |
| dc.source.conferencedate | 20/09/2004 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.source.endpage | 282 | |
| dc.title | A force study in brush scrubbing | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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