Publication:

Ultrathin high-k dielectrics from aqueous chemical solution deposition

Date

2007

Presentation

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Author(s)

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Van Elshocht, Sven

;

Van Bael, Marlies

;

;

Douheret, Olivier

;

De Gendt, Stefan

;

Adelmann, Christoph

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;

Conard, Thierry

;

Richard, Olivier

;

Franquet, Alexis

;

D'Olieslaeger, Marc

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Statistics

1902 since deposited on 2021-10-16

Acq. date: 2026-02-26