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Extraction of the top and sidewall mobility in FinFETs and the impact of fin-patterning processes and gate dielectrics on mobility

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1929 since deposited on 2021-10-16
2last month
Acq. date: 2026-09-17

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Views

1929 since deposited on 2021-10-16
2last month
Acq. date: 2026-09-17

Citations