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Extraction of the top and sidewall mobility in FinFETs and the impact of fin-patterning processes and gate dielectrics on mobility
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Extraction of the top and sidewall mobility in FinFETs and the impact of fin-patterning processes and gate dielectrics on mobility
Date
2007
Journal article
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16224.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Iyengar, Vikram V.
;
Kottantharayil, Anil
;
Tranjan, Farid M.
;
Jurczak, Gosia
;
De Meyer, Kristin
Journal
IEEE Trans. Electron Devices
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1919
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1919
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations