Publication:
Overview of wafer contamination and defectivity
Date
| dc.contributor.author | Bearda, Twan | |
| dc.contributor.author | Beaudoin, Stephen P. | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.date.accessioned | 2021-10-17T06:15:54Z | |
| dc.date.available | 2021-10-17T06:15:54Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13354 | |
| dc.source.beginpage | 93 | |
| dc.source.book | Handbook of silicon wafer cleaning technology | |
| dc.source.endpage | 164 | |
| dc.title | Overview of wafer contamination and defectivity | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |