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Practical steps towards wafer-scaled III-V vertical FETs fabrication

Date

2017
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dc.contributor.authorMilenin, Alexey
dc.contributor.authorVeloso, Anabela
dc.contributor.authorCollaert, Nadine
dc.contributor.authorPiumi, Daniele
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorPiumi, Daniele
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-24T09:17:25Z
dc.date.available2021-10-24T09:17:25Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28980
dc.identifier.urlhttp://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf
dc.source.beginpage232
dc.source.conference43rd International Conference on Micro and Nanoengineering - MNE
dc.source.conferencedate18/09/2017
dc.source.conferencelocationBraga Portugal
dc.source.endpage232
dc.title

Practical steps towards wafer-scaled III-V vertical FETs fabrication

dc.typeMeeting abstract
dspace.entity.typePublication
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